This is a meeting addressing the requirements on plasmas, in the etch and deposition of material, applicable to devices/ systems at the micro scale and in the transition to nano scale. The devices/ systems may be used, for example, in semiconductor, automotive, aeronautical, communications, photonics, medical or related industries.

All issues of importance to the use of plasmas or ion beams within the fields of micro and nano technology, fall within the scope of the meeting, including plasma modelling and diagnostic techniques, material processing, processing equipment and control systems. Relevant disciplines are Physics, Electrical and Electronic Engineering and Chemistry, as well as Medicine, Biology, Mathematics and Computing.

The meeting will include both invited and contributed presentations and is aimed to be relevant and useful to users of plasma technology from industry, experienced research workers and students and others looking to increase their participation in the fields of micro and nano technology.